Autori: Nakamura Y
Naslov | Electron transport coefficients in SiH4 and Si2H6 in dc and rf fields (Article) |
Autori | Shimada T Nakamura Y Petrovic Zoran Lj ![]() |
Info | JOURNAL OF PHYSICS D-APPLIED PHYSICS, (2003), vol. 36 br. 16, str. 1936-1946 |
Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
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