Autori: Hioki K
Naslov | Optical emission spectroscopy of pulsed inductively coupled plasma in Ar (Article) |
Autori | Hioki K Itazu N Petrovic Zoran Lj ![]() |
Info | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, (2001), vol. 40 br. 11A, str. L1183-L1186 |
Ispravka | Web of Science Elečas Rang časopisa Citati: Web of Science Scopus |
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Naslov | Diagnostics of an inductively coupled CF4/Ar plasma (Article) |
Autori | Hioki K Hirata H Matsumura S Petrovic Zoran Lj ![]() |
Info | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (2000), vol. 18 br. 3, str. 864-872 |
Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
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