Autori: Ringwood JV
| Naslov | Real-time plasma control in a dual-frequency, confined plasma etcher (Article) |
| Autori | Milosavljevic Vladimir M  Ellingboe AR Gaman C Ringwood JV
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| Info | JOURNAL OF APPLIED PHYSICS, (2008), vol. 103 br. 8, str. - |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
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